HVPE法によるAlN結晶成長システム
AlN Template on Sapphire
Standard Specifications | ||
Contents | Specifications | |
Sapphire Diameter | 2inch | 4inch |
Orientation | (0001) ±0.2° | |
Sapphire Thickness | 430±10um | 650±10um |
AlGan layer Thickness | ～1.6um | |
FWHM of X-ray Rocking curve for AlN(102) | (0002) & (10-12) < 550arcsec | |
Surface Finish | Epi-Ready | |
*上記以外の仕様は別途お問合せ下さい
Thickness measured for AlN template
| Optical transmission spectra measured  |
Image of AFM : Ra = 0.58nm(5x5μm2) | FWHM of (002) RC: 288 (arcsec) FWHM of (102) RC: 532 (arcsec)  |
AlGaN Template on Sapphire
Standard Specifications | ||
Contents | Specifications | |
Sapphire Diameter | 2inch | 4inch |
Orientation | (0001) ±0.2° | |
Sapphire Thickness | 430±10um | 650±10um |
AlGan layer thickness | ～2.5um | |
Al compositin | 10-90% | |
FWHM of X-ray Rocking curve for AlN(102) | <650 arcsec | |
Surface Finish | Epi-Ready | |
*上記以外の仕様は別途お問合せ下さい
Image of Microscope(x 200) for  | 20-0 scan of the(002) reflection by high  |
Optical transmission spectra measured  |